BHEL: Supply of POCl3 Diffusion Furnace for Solar Cells
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An atmospheric pressure diffusion furnace is required for phosphorus oxychloride based emitter diffusion on p-type, 156 mm size,pseudo-square/square mono crystalline or multi crystalline silicon wafers for solar cell fabrication. The equipment shall be a 4-stack arrangement with three of the tubes fully equipped with furnaces and other arrangements for operation. The scope shall include design, manufacture, and supply of equipment, installation, commissioning, and training for the operation of the equipment and warranty for 2 years.
For more information pls go through attached PDF…..document(1)
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